TargetSystem

Automatic Target Preparation for Both Visible and Hidden Targets

TargetSystem facts

Target preparation of microelectronic components
Automatic reliable target preparation
Analysis of visible and hidden targets
Drastically reduced preparation time
No dependency on operator skills
Full reproducibility
No need for costly abrasive films

TargetSystem is designed for target preparation of microelectronic components and delayering. It is the first failure analysis tool permitting real-time alignment and measurement of both visible and hidden targets, such as microvias and BGAs. System precision is an exceptional +/- 5.0 µm.

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Benefits
Features
Facts
References
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Short Preparation Times

An intelligent preparation system (IPS) automatically adapts the removal time and rate according to actual specimen properties and the grinding/polishing surface. This means fewer measurements and preparation times, down to less than 30 minutes.

Reproducibility

Automated processes make TargetSystem independent of operator skills, ensuring reproducibility regardless of the operator.

Low Operating Costs

TargetSystem can be used with any SiC paper, or any other consumable, and does not need costly abrasive films.

Case story: How Bosch Engineering Center Cluj increased Precision of Hidden-Target Preparation within 5 μm

TargetSystem Short preparation times — Short Preparation Times

TargetSystem Reproducibility — Reproducibility

TargetSystem Low operating costs — Low Operating Costs

KEY UNITS THAT ENABLE AUTOMATIC TARGET PREPARATION FOR BOTH VISIBLE AND HIDDEN TARGETS

TargetMaster

The heart of the TargetSystem is the TargetMaster, a 200 mm micropolisher with a closed polishing chamber to safeguard both preparation quality and the operator. Removal at the initial preparation step(s) is controlled by an electronic measuring system, for a rapid approach to the target. A second, in-line laser measuring system handles the demanding polishing steps.

TargetMaster
TargetZ

TargetZ is used for aligning and measuring specimens with visible (external) targets. With a powerful vision system of up to 680x magnification and its 15" TFT monitor, TargetZ makes it a simple task to map and align minute targets.

TargetZ
TargetX

TargetX is for hidden (internal) targets, and comprises a set-up station and a console. The set-up station is placed in the users x-ray (not included) and is operated from the external console, permitting real-time alignment and measuring.

TargetX
TargetDoser

TargetDoser is an automatic dosing station, providing preparation methods and process liquids to TargetMaster. TargetDoser comes with seven pumps and ten pre-programmed methods, and accommodates 200 user-defined methods.

TargetDoser
TargetGrip

TargetGrip is a tiltable specimen holder, dedicated to TargetMaster. It accommodates mounted samples up to 40 mm in diameter. Adapters are provided for larger specimens (TARIN), cross-sectioning (TARSC) and parallel polishing (TARPA), as well as a 40 mm to 25 mm adapter (TARAD), which serves as a SEM mount, as well.

TargetGrip

Facts

Model types

Model types
Technical Data

Model types

TargetSystem

TargetMaster - automatic target preparation

TargetMaster
200 mm micropolisher for automatic target preparation. Tiltable holder for 30 mm specimens and 200 mm MD-Disk included.

The dosing system is ordered separately.

Struers’ equipment is in conformity with the provisions of the applicable international directives and their appurtenant standards.
Struers’ products are subject to constant product development. Therefore, we reserve the right to introduce changes to our products without notice.

Technical Data

TargetSystem Technical Data Sheet

Struers Technical Data Sheets are designed to help you make the best choice of equipment for your particular purpose. You can find important information such as capacity and performance specifications, dimensions, weight, electrical data, noise levels, ambient conditions, and safety. In many cases you can also obtain an overview of accessories offering higher capacity and performance.

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Grinding & Polishing consumables

MD Grinding

For plane and fine grinding with virtually no artifacts

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Silicon Carbide Foil and Paper

For plane and fine grinding

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Grinding stones and discs

For high removal grinding with low deformation

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Diamond Pads

For plane and fine grinding of very hard materials

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Polishing cloths

For any material and preparation goal

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DP-Lubricants

For accurate cooling and lubrication while polishing

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DP-Products

Diamond suspensions in a wide variety of grain sizes and formats

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DiaDuo

All-in-one diamond suspension

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DiaPro

All-in-one diamond suspension optimized for a specific polishing cloth

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Challenge

The automotive electronics division of Robert Bosch in Romania was looking to improve their cross-sectioning results of microelectronic boards. Their challenge was the preparation of tiny and hidden targets beneath the surface of a BGA (electronic component) without introducing deformation to the specimen.

Solution

In cooperation with the Struers application team, a new preparation process was developed for Robert Bosch SRL to minimize deformation. They chose TargetSystem, the automatic target preparation system for both visible and hidden targets, plus Accutom precision cutting machine.

Result

Robert Bosch achieved the following results with TargetSystem:

• Increased quality and precision of results by an impressive +/- 5 µm
• Polishing/grinding preparation time was reduced
• Reduction of consumables, saving time and money

Alexandru Siean, Failure Analysis Technician, Robert Bosch SRL – Bosch Engineering Center Cluj

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Service Plans

Ensure uptime and optimize your processes with a Struers Service Plan. There are three levels to choose from: Prevent, Protect and Perform.

Service Packages

Including essential services and training, our all-in-one Service Packages ensure rapid start-up, output to specification, process optimization and uptime. Choose between three different Service Packages and combine them with Single Services according to your needs.

Single Services

Choose a Single Service and focus on your specific requirements to ensure high quality results and greater efficiency.

Our Support Commitment

Every Struers customer gets access to our global support network and expertise to ensure greater availability, predictability and uptime.